Topic/Type: 2.2 Kinetic methods, Particle-In-Cell and Vlasov, Poster

Particle-In-Cell/ Monte Carlo simulation of a low pressure rf plasma

A. Zahri1, G.J.M. Hagelaar1, E. Barisone2, L. Therese2, T. Nelis1, 2, P. Guillot2, P. Belenguer1

1 Laboratoire Plasma et Conversion d'Energie, Universit? Paul Sabatier , 118 route de Narbonne, F-31062 Toulouse cedex 9, France
2 Laboratoire Diagnostics des Plasmas Hors Equilibre, Universit? Jean-Fran?ois-Champollion, Place de Verdun - 81012 Albi, France

The particle-In-Cell combined to Monte-Carlo technique [1,2] is a well established method for plasma modelling, and has been used to simulate low pressure rf reactors. This technique is an efficient simple method of solving a wide variety of complex problems involving a large number of particles moving under the action of self generated and externally imposed forces.

The goal of our model is to understand and characterize the behavior of plasma at low pressure for a two-dimensional geometry. The considered gas is argon, the cross sections used are those of Phelps [4].

In this work we describe the PIC-MC model [5] for a capacitive radio-frequency discharge using a two-dimensional geometry. We will present the electron and ion energy distribution functions as well as macroscopic data as density and mean energy. The electrical characteristics of the dischage will be shown.

This work has been performed within the framework of an european project : New Elemental and Molecular Depht Analysis of advanced materials by modulated radio frequency glow discharge time of flight mass spectrometry. This project is supported by the European Commission through the six Framework Programme for Research and Technological Development.

[1] C. K. Birdsall and A. B. Langdon, Plasma Physics via Computer Simulation Adam Hilger, London, (1991).

[2] C. K. Birdsall and D. Fuss, J. Comput. Phys. 3, 494 (1969).

[3] V. Vahedi and M. Surendra, Comput. Phys. Commun. 87, 179 (1995).

[4] A. V. Phelps and Z. L. Petrovic, Plasma Sources Sci. Technol. 8, R21 (1999).

[5] E Kawamura, C K Birdsall, V Vahedi Plasma Sources Sci.Technol. 9 (2000) 413-428