Topic/Type: 2.2 Kinetic methods, Particle-In-Cell and Vlasov, Poster

Particle Modeling of Magnetic Neutral Loop Discharge plasma

A. V. Arsenin, V. G. Leiman, V. P. Tarakanov

Department of General Physics, Moscow Institute of Physics and Technology (State University), Dolgoprudny, Russia

The Neutral Loop Discharge (NLD) is variety of magnetically enhanced inductive coupled plasma (ICP) which is characterized by the presence of a closed magnetic neutral line [1]. The NLD is more efficient at low gas pressure in comparison with ICP due to existence of new type of collisionless electron heating ? stochastic heating close to the NL (like a physical realization of a Sinai billiard system with the wall of magnets) [2, 3]. We present two-and-a-half-dimensional particle simulation and analysis of the collisionless electron heating processes in a very high frequency NLD which is attractive plasma source for plasma processing. The characteristics of high-radio-frequency inductively coupled magnetic NLD are examined using a fully electromagnetic code KARAT [4, 5] based on the particle-in-cell/Monte-Carlo collision (PIC/MCC) method. The effect of gas pressure, antenna frequency and magnetic field configuration on the electron energy distribution functions are studied. Stochastic electron heating [3] and local (or partial) electron cyclotron heating are discussed. Also we present spatial distributions of electron density and electron temperature near the neutral loop for different initial parameters. Results of numerical simulation are in agreement with published experimental data, thereby making it possible to qualitatively interpret the latter.
Work supported by the Russian Foundation for Basic Research (Grants No. 07-08-00497 and No. 09-07-00285) and the Russian Federal Agency of Education.

[1] T. Uchida et al. J. Phys. D: Appl. Phys. 41, 083001 (2008).

[2] R.L. Dewar et al. Phys. Rev. E 60, 7400 (1999).

[3] Z. Yoshida et al. Phys. Rev. Lett. 81, 2458 (1998).

[4] V.P. Tarakanov, User?s manual for code KARAT (Springfield, VA: Berkley Research Associates, Inc., 1992).

[5] A.V. Arsenin et al. J. Comm. Technol. and Electron. 52, 906 (2007). A.V. Arsenin et al. Bulletin of the Lebedev Physics Institute 4, 15 (2003).