Topic/Type: 1.5 Low-temperature, dusty and nano-plasmas, Poster

2D axially symmetric computer simulation of microwave induced plasmas using Plasimo

M. Jimenez, J. van Dijk, J. van der Mullen

Department of Applied Physics, Eindhoven University of Technology, Eindhoven, The Netherlands

Microwave Induced Plasmas (MIPs) are interesting for industrial and academic purposes: surface treatment, creation of radicals, light sources, etc. In the particular case of surface waves discharges (SWDs), the electromagnetic waves propagate along the plasma column which acts as a propagating medium. An essential part of SWDs is the field applicator or launcher, i.e. the metal structure which convert the wave modes coming from the power supplier into surface wave modes. Well known type of launchers are the surfatron, waveguide-surfatron and surfaguide [1, 2].
For creating a SWD model, three important modeling aspects are needed: The transport of species inside the plasma, the chemical compositions and the interaction between electromagnetic (EM) waves and plasma. Due to the several non-linear equations involved in the process, it is necessary to use a self-consistent computer model. For this reason the Plasimo toolkit [3-5] is used as it offers a high flexibility to deal with different settings of the chemistry, flow and power coupling equations. The modular design of Plasimo allow the user to compose a new model: using the different (sub)models available and/or adding new models.
We have extended Plasimo including a new electromagnetic model. This model permit us to include multiple electromagnetic configurations. In order to present the new electromagnetic model, we have considered an argon plasma for two electromagnetic configurations: surfatron and waveguide-surfatron.

[1] M. Moisan, ?Microwave Excited Plasmas?, Elsevier, (1992).
[2] M Moisan et al, ?An atmospheric pressure waveguide-fed microwave plasma torch: the TIA design?, Plasma Sources Sci. Technol. 3 584-592, (1994).
[3] BD. Benoy ?Modelling of thermal argon plasmas?, PhD Thesis Eindhoven University of Technology, (1993).
[4] G.?M. Janssen. ?Design of a General Plasma Simulation Model, Fundamental Aspects and Applications?, PhD thesis, Eindhoven University of Technology, The Netherlands, 2000
[5] J. van Dijk. ?Modeling of Plasma Light Sources - an object-oriented approach?, PhD thesis, Eindhoven University of Technology, The Netherlands, 2001.